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mechatronic wafer loader neo (mWL neo)
With our new wafer loader neo (mWL neo) we give you a highly flexible modular EFEM for integration with metrology and process systems.
Next generation EFEM for integration with process and metrology equipment
As a further development of the "classic" mWL, the mWL neo represents an optimal opportunity to operate in an even more versatile way. For that, mechatronic systemtechnik gmbh has moved the complexity of critical handling components to the modules and the software framework. Our mWL neo can support simple as well as complex handling requirements.
mechatronic wafer loader neo (mWL neo) key features
Increased modularity to reduce production and customization effort (load ports, robot and more)
Flexibility for substrate sizes, types and their combinations as known – Capability to handle the widest range of different wafers and frames in industry
Standardized main frame for short lead time and reduced costs: available in 3 sizes (2-wide, 3-wide and 4-wide)
