years of wafer handling experience


systems installed


panels at sizes 
up to


wafer sizes

Explore our products

mechatronic systemtechnik gmbh is a company that combines mechanical, electrical, and control systems to develop automated handling systems. These systems automate tasks like picking, placing, and transporting wafer using components like sensors, actuators, and control systems. They enhance productivity and efficiency in industries such as manufacturing, logistics, and healthcare. Our versatile EFEM products excel in loading and unloading wafers and frames from cassettes to an OEM system, accommodating various wafer types with the flexibi​lity to meet custom requirements. We confidently handle diverse wafer specifications, providing tailored solutions to meet our customer's unique needs. 

Automated Handling System

 Equipment ​Front - End​ Module 

we can handle it