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mechatronic wafer loader neo (mWL neo)

With our new wafer loader neo (mWL neo) we give you a highly flexible modular EFEM for integration with metrology and process systems. 

Next generation EFEM for integration with process and metrology equipment

As a further development of the "classic" mWL, the mWL neo represents an optimal opportunity to operate in an even more versatile way. For that, mechatronic systemtechnik gmbh has moved the complexity of critical handling components to the modules and the software framework. Our mWL neo can support simple as well as complex handling requirements. 

mechatronic wafer loader neo (mWL neo) ​key features 

mechatronic wafer loader neo (mWL neo) key benefits

One system, many options

​mechatronic wafer loader neo (mWL neo)

load port 
modules

end effector change station

flip modules

pre-aligner

functional modules

Main frame

Software

Modules

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