Unlike most other suppliers, our sytems integrate wafer flipping onto the robot. By eliminating the flipping station, we reduce the impact to throughput. This feature, along with the supply of multiple media and electrical connections to the end effector, enable a very fast and cost-effective approach to this task.
mechatronic systemtechnik gmbh’s proprietary end effectors, pre-aligners, mapping systems, and chucks are the reason why specialty handling approaches can be addressed.
We have the ability to customize all components in our systems for various requests, to enable safe and reliable handling of nearly all substrate types used in power, sensor, and MEMS device manufacturing.
Wafer flipping is a common requirement when manufacturers need to perform back side processes or metrology operations. In particular, processes such as back side metallization, back side implantation, or dielectric growth, as well as their related metrology steps.
Unlike most other suppliers, mechatronic systemtechnik gmbh integrates wafer flipping onto the robot. Wafer flipping two option one on the robot one on external module if it is not possible with the robot because of wafertype or process.By eliminating the flipping station, we reduce the impact to throughput. This feature, along with the supply of multiple media and electrical connections to the end effector, enable a very fast and cost-effective approach to this task.
