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Multiple wafer types and sizes

Across mechatronic’s product range, we can integrate up to 12 different end effectors into a system. This capability opens up more possibilities in the optimization of end effectors for various handling tasks. End effectors are stored in a dedicated change station, which is fully automated based on the various handling recipes. For added assurance, the end effectors are individually coded to avoid misprocessing.  mechatronic syste​mtechnik gmbh’s proprietary end effectors, pre-aligners, mapping systems, and chucks are the reason why specialty handling approaches can be addressed. We have the ability to customize all components in our systems for various requests, to enable safe and reliable handling of nearly all substrate types used in power, sensor, and MEMS device manufacturing.

   Handling of different wafer types and sizes​ 

mechatronic systemtechnik gmbh's proprietary end effectors can be customized for the handling of various critical substrates. As the same end effector cannot be used across wafers of different sizes, types, or handling requirements,  we have developed a fully automated change mechanism for its end effectors, in combination with an end effector change station, where up to 12 different end effectors can be stored in the system.

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End effector ​Measurement

An "End Effector Measurement Station" is a specialized setup that ensures the accuracy of robotic systems using end effectors. It measures the end effector's dimensions and alignment after changes or before processes to confirm if it meets required specifications. By doing so, it maintains system reliability, prevents disruptions, and supports efficient, high-quality operations. This station plays a vital role in maintaining the precision and performance of automated processes.

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Automated coupling of end effectors

The change of the end effector is fully automated based on the various handling recipes. For added assurance, the end effectors are individually coded to avoid mispocessing. mechatronic systemtechnik gmbh is also capable of supplying multiple connections (e.g. air, electrical) through the coupling.

Home / products multiple wafer types and sizes

we can handle it